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ANALYSIS OF FORMATION AND ORDERING MODELS OF ALUMINUM OXIDE’S POROUS STRUCTURE
Averin Igor' Aleksandrovich, Doctor of engineering sciences, professor, head of sub-department of nano and microelectronics, Penza State University (Penza, 40 Krasnaya str.), firstname.lastname@example.org
Action concept of devices in microelectronics is generally based on surface effects, and that stipulates in the process of their production the intensive use of materials with developed surface, such as porous aluminum oxide. However up to date there is still no universal theory explaining the development under various formation
porous aluminum oxide, formation models, nanomaterials, ordering, pore, oxide film, modes of formation, electrolyte.
1. Nanotekhnologii v Elektronike, pod red. Yu. A. Chaplygin [Nanotechnologies in electronics: edited by Yu.A. Chaplygin]. Moscow: Tekhnosfera, 2005, 450 p.
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